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HX80N Series-Semi-automatic probe stations-LINKPHYSICS

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HX80N Series

HX80N Series

The HX80N series semi-automatic probe station is a customised comprehensive wafer probe station for sensor wafer testing with excellent test accuracy and can be paired with a customised instrumentation system to complete testing of sensors such as photoelectric sensors, pressure sensors and gas sensors.

HX80N Series Overview

  The HX80N series semi-automatic probe station is a customised comprehensive wafer probe station for sensor wafer testing with excellent test accuracy and can be paired with a customised instrumentation system to complete testing of sensors such as photoelectric sensors, pressure sensors and gas sensors.


Software function introduction
- Can test discs, test range is optional, support for interlaced sampling and ring test MAP chart can be edited test;
- Support bad point retest;
- With offline punching point, synchronous punching point function;
- With contact buffer function, needle mark stability;
- Running accuracy compensation function, to ensure the stability of the test;
- Test yield, total number, speed display;
- CCD image automatic alignment and positioning;
- The equipment has a certain anti-interference ability, supports high and low temperature testing, stable operation;
- Multi-BIN classification test, test data can be stored, can be exported, compatible with the use of back-channel equipment format, with data statistical analysis function;
- Operators, administrators, system manufacturers rights management functions

HX80N Series Technical Parameter

Parameters and indicators:

Performance name
Technical indicators
The diameter of the film can be measured
6″、12″
XY worktable
Structure
Linear motor
Itinerary
350mm × 400mm,Resolution:1μm
Spped
>150mm/s
Positioning accuracy
≤±2μm
Sheet bearing platform
Z-direction travel
10mm,Resolution:1μm
Z-platform accuracy
≤±1μm
Z-direction resolution
≤±0.5μm
θ-direction adjustment range
±25°
θ-direction resolution
0.006°
Microscope/Video display system
Binocular stereomicroscope/Optional trinocular microscope and CCD real-time video display device

HX80N Series Basic Configuration

Semiconductor
IC
Wafer

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