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HX12N Series-Semi-automatic probe stations-LINKPHYSICS

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HX12N Series

HX12N Series

HX12N series semi-automatic probe table is equipped with high-precision linear motor sliding table module, the stroke to meet the 8-inch, 12-inch chip testing. High positioning accuracy, fast response speed and long service life and other advantages, the sliding table is also equipped with a high-precision grating feedback system to ensure the reliability of the operating accuracy, and the module for the company's own research products, to ensure the quality of the finished product and the production cycle of the module for the test of the probe table provides a fast and accurate hardware protection.

HX12N Series Overview

HX12N series semi-automatic probe table is equipped with high-precision linear motor sliding table module, the stroke to meet the 8-inch, 12-inch chip testing. High positioning accuracy, fast response speed and long service life and other advantages, the sliding table is also equipped with a high-precision grating feedback system to ensure the reliability of the operating accuracy, and the module for the company's own research products, to ensure the quality of the finished product and the production cycle of the module for the test of the probe table provides a fast and accurate hardware protection.


Software function introduction
- Can test discs, test range is optional, support interlaced sampling and ring test, MAP chart can be edited test;
- Support bad point retest;
- With offline punching point, synchronous punching point function;
- With contact buffer function, needle mark stability;
- Running accuracy compensation function, to ensure the stability of the test;
- Test yield, total number, speed display;
- CCD image automatic alignment and positioning;
- The equipment has a certain anti-interference ability, supports high and low temperature testing, stable operation;
- Multi-BIN classification test, test data can be stored, can be exported, compatible with the use of back-channel equipment format, with data statistical analysis function;
- Operators, administrators, system manufacturers rights management functions

HX12N Series Technical Parameter


Parameters and indicators:

Performance name
Technical indicators
The diameter of the film can be measured
8″、12″
XY worktable
Structure
Linear motor
Itinerary
230mm × 220mm,Resolution:1μm
Speed
>200mm/s
Positioning accuracy
≤±2μm
Sheet bearing platform
Z-direction travel
10mm,Resolution:1μm
Z-platform accuracy
≤±1μm
Z-direction resolution
≤±0.5μm
θ-direction adjustment range
±25°
θ direction resolution
0.006°
Microscope/Video display system
Binocular stereomicroscope/Optional trinocular microscope and CCD real-time video display device
Temperature control range
-45℃~150 ℃
Temperature setting resolution
0.1 ℃
Temperature uniformity
-45°C 至 +150°C < ±1 °C,>150 °C < ±1 %


HX12N Series Basic Configuration

Semiconductor
IC
Wafer

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